Investigation of Influence of Gas Ratio on the Electron Temperature in TiN Magnetron Sputtering Deposition System
نویسندگان
چکیده
In this work, a nanolayer of titanium nitride which produced by the magnetron sputtering system is synthesized. Moreover the effect of plasma parameters on the electron temperature is studied. Electron temperature has a significant effect on the plasma coating system properties. The results show that, increasing the working pressure and nitrogen ratio in the system causes decreasing electron temperature.
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